AVS 50th International Symposium
    Microelectromechanical Systems (MEMS) Wednesday Sessions

Session MM-WeM
New Frontiers in Microsystems: NEMS and BioMEMS

Wednesday, November 5, 2003, 8:20 am, Room 320
Moderator: R. Ghodssi, University of Maryland


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am MM-WeM1 Invited Paper
The Science and Technology of Nanomechanical Resonant Structures
L. Sekaric, Cornell University
9:00am MM-WeM3
Investigation of Nanostructuring by Use of Focused Ion Beam Fine Milling
Y. Fu, Nanyang Technological University, Singapore
9:20am MM-WeM4
Electron Interactions in Nanoscale Focused Electron Beam Processing
P.D. Rack, J. Kim, J.D. Fowlkes, S.J. Randolph, D.C. Joy, University of Tennessee
9:40am MM-WeM5 Invited Paper
BioMEMS-Based Platforms for Drug Delivery: Implantable, Ingestible, and Beyond
T.A. Desai, Boston University
10:20am MM-WeM7
Flexible, Polyimide-Based Microfluidic Devices for BioMEMS
S. Metz, A. Bertsch, Ph. Renaud, Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland