AVS 50th International Symposium
    Microelectromechanical Systems (MEMS) Wednesday Sessions
       Session MM-WeM

Paper MM-WeM3
Investigation of Nanostructuring by Use of Focused Ion Beam Fine Milling

Wednesday, November 5, 2003, 9:00 am, Room 320

Session: New Frontiers in Microsystems: NEMS and BioMEMS
Presenter: Y. Fu, Nanyang Technological University, Singapore
Correspondent: Click to Email
Micro-pillars with nano-sizes for application of molecular controlling were fabricated by use of focused ion beam (FIB) fine milling on substrate of silicon. The nano-pillars can realize cell/molecular adhesion, and movement control by its high-density contact dots and tiled cone angle of the pillars, which can be obtained by means of FIB directly fine milling with a stage in a certain tilted angle. The milling process was investigated under different beam current and the stage-tilting angle, which determines an aspect ratio and the tilted angle of the pillars. Chemical assistant etching (GAE) with chemical gas of XeF2 was used for the purpose of deviating the pillars with higher aspect ratio. With these features, the pillars can realize cell/molecular movement in only one direction and cannot be backward. It will be helpful for DNA and protein analysis, such as molecule separation and purification, molecular detection, and DNA hybridization, etc.