AVS 50th International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS1-WeM

Paper PS1-WeM2
Insights into Nanoparticle Formation Processes in a Thermal Plasma Process

Wednesday, November 5, 2003, 8:40 am, Room 314

Session: Plasma Processing of Nanostructures and Nanomaterials
Presenter: C.R. Perrey, University of Minnesota
Authors: C.R. Perrey, University of Minnesota
C.B. Carter, University of Minnesota
T. Renault, University of Minnesota
A. Gidwani, University of Minnesota
R. Mukherjee, University of Minnesota
X. Wang, University of Minnesota
J. Hafiz, University of Minnesota
W.M. Mook, University of Minnesota
W.W. Gerberich, University of Minnesota
P.H. McMurry, University of Minnesota
J.V.R. Heberlein, University of Minnesota
S. Girshick, University of Minnesota
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As nanoscale metal and ceramic particles are increasingly considered for industrial applications, a fundamental understanding of the effects of processing on particle morphology is required. The size, shape, structure, chemistry, and resulting properties of nanoparticles are all potentially functions of the formation method. This study examines the structure and chemistry of both nanoparticle films and individual nanoparticles produced by hypersonic particle plasma deposition. The process utilizes a thermal plasma to generate nanoparticles which are then rapidly assembled to form nanostructured films; the mechanical properties of both the particles and the films appear to differ significantly from the bulk material of the same composition. Observations made by electron microscopy are used to analyze the materials at each stage of the process. The presence of nanoparticles with atomically flat planar defects and a spherical shape imply a rapid condensation and crystallization from the gas phase. This paper will illustrate studies involving the production of Si, SiC, and Ti nanoparticles and nanostructured films, allowing comparisons for the different materials.