AVS 50th International Symposium
    Plasma Science and Technology Thursday Sessions
       Session PS1-ThM

Paper PS1-ThM11
Molecular Dynamics Simulations of Organic Polymer Etching by H@sub 2@/N@sub 2@ and NH@sub 3@ Plasmas

Thursday, November 6, 2003, 11:40 am, Room 314

Session: Plasma-Surface Interactions: Deposition
Presenter: H. Yamada, Kyoto University, Japan
Authors: H. Yamada, Kyoto University, Japan
S. Hamaguchi, Kyoto University, Japan
Correspondent: Click to Email
Using classical molecular dynamics (MD) simulations, plasma-surface interactions have been investigated for organic polymer etching processing with H@sub 2@/N@sub 2@ and NH@sub 3@ plasmas. To perform MD simulation in such systems, we have developed an interatomic potential model applicable to systems consisting of H, C, and N atoms [i.e., (H,C,N) systems]. Further we have also worked with the Abel-Tersoff-Brenner (ATB) potential proposed for (H,C) systems. Reducing the dielectric constants of insulating materials for interconnect circuits is of significant importance for the manufacturing of fast computer chips based on the copper wiring. For this purpose, organic polymers with low dielectric constants (i.e. low-k) have been studied recently as an alternative to SiO@sub 2@. In addition to such use, organic polymers have been studied for other applications, for example, substrates of healthcare chips and optical waveguides. Hydrogen and nitrogen based plasmas such as N@sub 2@+H@sub 2@ or NH@sub 3@ plasmas are often used to etch such polymer surfaces with micron and submicron structures. The goal of this work is to study plasma-surface interactions of polymer etching process, using classical MD simulations. To represent surface reactions correctly, it is critical to employ realistic interatomic potential functions for MD simulations. In this work, therefore, we present interatomic potential functions for (H,C,N) systems, extending the Stillinger-Weber potential with some modification such as the inclusion of double and triple bonds. To compare simulation results with our potential model with those with other potential models, we have also run MD simulations with the ATB potential. Because many low-k organic polymers contain Benzene-like rings, we use poly (1,4-phenylene) as our model substrate. Preliminary results of the MD simulations will be presented.