AVS 50th International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS-WeP

Paper PS-WeP16
Creation and Characteristics of Miniature Microwave Plasmas

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: J. Narendra, Michigan State University
Authors: J. Narendra, Michigan State University
T.A. Grotjohn, Michigan State University
J. Asmussen, Michigan State University
Correspondent: Click to Email
Small microwave generated plasma discharges are characterized to determine their properties for discharges with sizes ranging from 0.3 mm to 3 mm. The discharge characteristics investigated include microwave power density, plasma density, electron temperature and gas temperature. The outcome of this investigation is an understanding and quantification of the microwave power density needed to operate small discharges of specific sizes, shapes, pressures, and gas compositions. The microwave plasma source technology used in this investigation is a microstripline based plasma source with the discharge created in a quartz tube of 0.3 mm to a few mm in inside diameter. A microstripline is used to couple 2.45 GHz microwave energy into a discharge confined in a tube orientated perpendicular to the stripline conductor. The discharge formed often is a surface wave discharge. The plasma compositions investigated include argon, nitrogen, air, and hydrogen discharges. The pressure range investigated ranged from 100 mTorr to 1 atmosphere. The diagnostic measurements were performed using Langmuir probes and optical emission spectroscopy. The plasma characteristics measured and modeled indicate that as the characteristic dimension of the discharge decreases to less than 1 mm, the power densities approach and exceed 1000 W/cm@super 3@ and the plasma densities are above 10@super 13@ cm@super -3@. A specific application to be discussed is the plasma-assisted deposition of coatings on the inside of tubes.