AVS 50th International Symposium
    Plasma Science and Technology Monday Sessions
       Session PS-MoA

Paper PS-MoA9
Large Area Electron-Beam Generated Plasma Processing System@footnote 1@

Monday, November 3, 2003, 4:40 pm, Room 314

Session: Plasma Sources
Presenter: D. Leonhardt, Naval Research Laboratory
Authors: D. Leonhardt, Naval Research Laboratory
C. Muratore, Naval Research Laboratory
S.G. Walton, Naval Research Laboratory
D.D. Blackwell, SFA Inc.
R.F. Fernsler, Naval Research Laboratory
R.A. Meger, Naval Research Laboratory
Correspondent: Click to Email
NRL has developed a 'Large Area Plasma Processing System' (LAPPS) using an electron beam (e-beam) to initiate the gas ionization process with the goal being the increased control over the flux of reactive species to the surface and the ability to modify surfaces over large areas. Our system demonstrates that the e-beam ionization process is largely independent of gas composition and capable of producing low temperature plasma electrons in high densities over large areas (square meters). The system consists of a planar plasma distribution generated by a magnetically collimated sheet of 2 keV, < 1 mA/cm@super 2@ electrons injected into a neutral gas background (oxygen, nitrogen, sulfur hexafluoride, argon). Typical operating pressures range from 20-200 mtorr with beam-collimating magnetic fields (100-200 Gauss) for plasma localization. This presentation will focus on (1) the production of a large area (> 0.5 m@super 2@) system and (2) applications of these plasma sources for surface modification. Construction, scaling and uniformity at the substrate in the large plasma source will be discussed, including the processing stage configurations and layout. General characteristics of these plasmas will be discussed and illustrated through time-resolved in situ plasma diagnostics (Langmuir probes, microwave transmission and mass spectrometry). @FootnoteText@@footnote 1@ Work supported by the Office of Naval Research@footnote 2@ Muratore, C., NRL/ASEE Postdoctoral Research Associate.