AVS 50th International Symposium | |
Plasma Science and Technology | Monday Sessions |
Session PS-MoA |
Session: | Plasma Sources |
Presenter: | St. Schneider, Forschungszentrum Juelich, Germany |
Authors: | St. Schneider, Forschungszentrum Juelich, Germany T.W. Jolly, Oxford Instruments Plasma Technology Ltd. H. Kohlstedt, Forschungszentrum Juelich, Germany R. Waser, Forschungszentrum Juelich, Germany |
Correspondent: | Click to Email |