AVS 50th International Symposium
    Manufacturing Science and Technology Tuesday Sessions
       Session MS-TuP

Paper MS-TuP13
Calibration Standards for X-ray Metrology Systems using a Traceable High-resolution Diffractometer

Tuesday, November 4, 2003, 5:30 pm, Room Hall A-C

Session: Poster Session
Presenter: D. Windover, National Institute of Standards and Technology
Authors: D. Windover, National Institute of Standards and Technology
J. Cline, National Institute of Standards and Technology
Correspondent: Click to Email
The wealth of information that can be obtained from the characterization of thin film structures by means of X-rays techniques has lead to a dramatic increase in their use in recent years. However, currently their are no traceable standards available to calibrate the behavior of these new specialized characterization systems. High resolution X-ray instruments require an entirely new type of artifact to characterize both the the parallel beam optics and the performance of the goniometers. Likewise, X-Ray reflectivity requires accuracy in the incident and reflection angles orders of magnitude higher than needed for previous conventional powder diffraction calibration. This work details current efforts for providing NIST Standard Reference Materials for high resolution X-ray diffraction and reflectivity that are traceable to the SI. We focus primarily on the construction and calibration of an advanced X-ray diffractometer designed from the onset to offer flexibility in its configuration and traceable measurements. Features include: high intensity, well characterized, parallel beam X-rays produced using a rotating anode and finely controlled goniometer rotations with both accuracy and precision monitored by optical encoders. We discuss the calibration of the accuracy for the @theta@ and 2@theta@ axes through the method of circle closure. We demonstrate both vibration and temperature effects on goniometer positioning and discuss current improvements to the system designed to account for these effects. Proposed structures for high resolution and reflectivity standards will be presented.