AVS 49th International Symposium
    Microelectromechanical Systems (MEMS) Wednesday Sessions
       Session MM+NS-WeM

Invited Paper MM+NS-WeM1
Probing Nanomechanical Systems with Electron Tunneling Devices

Wednesday, November 6, 2002, 8:20 am, Room C-210

Session: Nanotechnology and Nanofabrication in NEMS
Presenter: A.N. Cleland, University of California, Santa Barbara
Correspondent: Click to Email
We have been integrating active electronic devices with nanomechanical systems, in order to probe both the mechanical and thermodynamical behavior of the integrated system. I will discuss experiments in which we have developed fabrication approaches allowing the integration of superconductor-normal metal tunnel junctions with suspended mechanical structures to develop an ultrasensitive bolometer and calorimeter, with which we have been able to confirm the observation of the quantum of thermal conductance, the integration of single-electron transistors with mechanical resonators, displacement sensing using an integrated quantum point contact, and the development of a double quantum dot integrated with an L-band mechanical resonator. I will briefly discuss the potential application of these types of integrated probes for quantum-limited measurements.