AVS 49th International Symposium
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP34
A New Design in Atmospheric Plasma Generation Improves Versatility for Surface Treatment Applications in Industry

Tuesday, November 5, 2002, 5:30 pm, Room Exhibit Hall B2

Session: Plasma Applications
Presenter: D. Chrysostomou, TePla AG, Germany
Authors: D. Chrysostomou, TePla AG, Germany
S. Goloviatinskii, TePla AG, Germany
Correspondent: Click to Email
Inexpensive materials, with excellent applied bulk properties, often require surface modification to improve bondability and printability. Plasma treatment is an established industrial method for such surface modifications. Use of atmospheric plasma is more cost effective than low pressure systems and can be easily operated in continuous mode. This presentation introduces a novel design in atmospheric plasma generators that overcomes many of the disadvantages previously associated with this treatment method. A low current , 100 - 250 mA, high voltage, 1000 - 1700 V, pulsed DC arc discharge generator permits electrode construction with small dimensions. The light weight of each electrode assembly, 200 g, allows low cost operation by robotic systems. Fast point-to-point processing is possible due to very short plasma ignition times. The electrode design confines current and voltage within the discharge chamber and ensures no electrical charge transfer to the treatment surface (critical for metals and metal/dielectric hybrids in wire bond applications). Very high density equilibrium plasma, 100 W/cm@super 3@, ensures uniform and highly effective treatments at high speed, up to 2m/sec for polycarbonate, acrylic, and silicone materials. The electrode construction produces a low temperature discharge without generating UV or ozone. NO@sub x@ levels are in the order of 100 ppm and are managed by standard filter systems. XPS analysis shows no contamination of sputtered electrode material, an essential requirement for medical, optical, and IC applications. Treatment widths of up to 40 mm are possible with a single power supply, and these systems can be further arrayed for extended treatment widths. Current electrode lifetimes exceed 1500 hours.