AVS 49th International Symposium
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP12
Plasma Characteristics of Magnetically Confined Linearly Extended Inductively Coupled Plasma

Tuesday, November 5, 2002, 5:30 pm, Room Exhibit Hall B2

Session: Plasma Applications
Presenter: B.K. Song, Sungkyunkwan University, Korea
Authors: B.K. Song, Sungkyunkwan University, Korea
Y.J. Lee, Sungkyunkwan University, Korea
C.H. Jeong, Sungkyunkwan University, Korea
G.Y. Yeom, Sungkyunkwan University, korea
Correspondent: Click to Email
Development of large-area high-density plasma sources is desired for a variety of next-generation plasma processing from microelectronic device fabrications to high resolution flat panel display(FPD). The plasma source developed for these application includes surface wave plasmas, inductively coupled plasmas, etc. In these plasmas, however, problems in conjunction with electron energy such as SiO@sub2@/Si etch selectivity, etc. have been reported. These are related to the fact that the high energy portion of the electrons are prone to be exceedingly energetic in high density plasmas generated especially at low pressure and cause inadequate radical/ion ratio in the plasma. In this study, parallel-connected linear inductive antenna designs have been used to generate inductively coupled plasmas and, to improve both the plasma density and the electron temperature control, multiple-cusp magnetic fields employing permanent magnets were used and the effects of various magnet combinations and process conditions on the plasma characteristics were studied. The permanent magnets having 3000G on the magnet surface were arranged above the parallel-connected linear copper antennas by varying center-to-center distance of the magnets. Plasma characteristics such as electron temperature, ion density, and electron energy distribution functions were measured by a Langmuir probe as a function of with/without multiple-cusp magnetic confinement at low pressure Ar plasmas. The use of optimized multiple-cusp magnetic confinement in the parallel-connected linear inductive antenna designs showed improved electron temperature control in addition to the increase of plasma density. QMS(Hiden Analytical Inc., PSM 500) and OES(SC technology., PCM 402) measurement were also carried out to characterize the plasmas for the parallel-connected linear inductive antenna designs with/without the multiple-cusp magnetic confinement.