| AVS 49th International Symposium | |
| Microelectromechanical Systems (MEMS) | Wednesday Sessions |
| Session MM-WeP |
| Session: | Poster Session |
| Presenter: | T.C. Shih, University of Minnesota |
| Authors: | T.C. Shih, University of Minnesota J.W. Dong, University of Minnesota J.Q. Xie, University of Minnesota X.Y. Dong, University of Minnesota S. McKernan, University of Minnesota R.D. James, University of Minnesota C.J. Palmstrom, University of Minnesota |
| Correspondent: | Click to Email |