AVS 49th International Symposium
    Applied Surface Science Thursday Sessions
       Session AS-ThA

Paper AS-ThA8
XPS Analysis under External DC and AC Bias

Thursday, November 7, 2002, 4:20 pm, Room C-106

Session: Practical Surface Science II
Presenter: S. Suzer, Bilkent University, Turkey
Authors: S. Suzer, Bilkent University, Turkey
B. Ulgut, Bilkent University, Turkey
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Charging is a nuisance in XPS analysis and is usually circumvented by flooding the sample with low energy electrons. External biasing is an easier/cheaper alternative and can even give additional static or dynamical information about charging which can in turn be related to composition of the sample. In this contribution, we will present XPS spectra of Au/SiO2/Si system under various DC and AC (square-wave) bias conditions and discuss the issues related to charging and/or composition.