IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11), Session VST+MS-FrM

IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
Vacuum Science & Technology	Friday Sessions

Session VST+MS-FrM
Semiconductor & Functional Coating Systems & Processes

Click a paper to see the details. Presenters are shown in bold type.

8:20am	VST+MS-FrM1 Invited Paper Advances in Semiconductor Physical Vapor Deposition Equipment; Vacuum, System Architecture, and PVD Source Technology D.J. Harra, Novellus Systems, Inc.
9:00am	VST+MS-FrM3 Enhancement of Dielectric CVD Remote Clean Competitiveness Through Improved Gas Utilization T. Nowak, T. Tanaka, B.H. Kim, M. Seamons, K.B. Jung, Applied Materials, Inc.
9:20am	VST+MS-FrM4 Invited Paper Vacuum System Architecture for Disk and Flat Panel Production Tools J.L. Hughes, J. Busch, Intevac Inc.
10:00am	VST+MS-FrM6 Disassembling and Materials Recovering Process of Zinc-Carbon battery by Vacuum Aided Recycling Systems Technology Y. Saotome, Gunma University, Japan, Y. Nakazawa, Kokushikan University, Japan, Y. Yamada, Nagata Seiki Co., Ltd., Japan
10:40am	VST+MS-FrM8 The Foundations of Vacuum Coating Technologies D.M. Mattox, Management Plus, Inc.
11:00am	VST+MS-FrM9 Invited Paper Downstream Effluent Management Subsystems for Semiconductor Manufacturing Processes Y. Gu, MKS Instruments, Inc.