| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Semiconductors | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | SC+SS+EL-WeA1 Invited Paper The Chemistry of Anisotropic Silicon Etching: Tackling an Old Problem with New Tricks M.A. Hines, Cornell University |
| 2:40pm | SC+SS+EL-WeA3 In situ Infrared Spectroscopy of Wet Chemical Etching of Si and InP with Electrochemical Control O. Pluchery, S.B. Christman, Y.J. Chabal, Agere Systems |
| 3:00pm | SC+SS+EL-WeA4 Atomic Hydrogen Etching in Hot Wire Chemical Vapor Deposition System of Silicon Thin Films E. Gulari, O. Srivannavit, University of Michigan |
| 3:20pm | SC+SS+EL-WeA5 Single Ion Impact Effects on Semiconductor and Insulator Surfaces Induced by Slow, Very Highly Charged Ions T. Schenkel, Lawrence Berkeley National Laboratory, A.V. Hamza, J.W. McDonald, D.H. Schneider, A. Kraemer, A. Persaud, Lawrence Livermore National Laboratory |
| 3:40pm | SC+SS+EL-WeA6 Ex Situ Removal of Carbon and Oxygen from a Gallium Nitride (0001) Surface F. Machuca, Z. Liu, Y Sun, R.F.W. Pease, W.E. Spicer, Stanford University, P. Pianetta, SSRL and Stanford University |
| 4:00pm | SC+SS+EL-WeA7 The Study of InP(100) Chemical Cleaning by Synchrotron Radiation Photoemission Spectroscopy Y Sun, F. Machuca, Z. Liu, Stanford University, P. Pianetta, Stanford Synchrotron Radiation Lab, W.E. Spicer, Stanford University |
| 4:20pm | SC+SS+EL-WeA8 Ion Irradiation Induced Spontaneous Nanoscale Corrugation on Silicate Glasses C.C. Umbach, Cornell University, R.L. Headrick, Cornell High Energy Synchrotron Source, K.-C. Chang, J.M. Blakely, Cornell University |