IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Semiconductors Wednesday Sessions
       Session SC+SS+EL-WeA

Paper SC+SS+EL-WeA5
Single Ion Impact Effects on Semiconductor and Insulator Surfaces Induced by Slow, Very Highly Charged Ions

Wednesday, October 31, 2001, 3:20 pm, Room 111

Session: Chemistry of Semiconductor Etching & Cleaning
Presenter: T. Schenkel, Lawrence Berkeley National Laboratory
Authors: T. Schenkel, Lawrence Berkeley National Laboratory
A.V. Hamza, Lawrence Livermore National Laboratory
J.W. McDonald, Lawrence Livermore National Laboratory
D.H. Schneider, Lawrence Livermore National Laboratory
A. Kraemer, Lawrence Livermore National Laboratory
A. Persaud, Lawrence Livermore National Laboratory
Correspondent: Click to Email
The interaction of slow (<5 keV/u), very highly charged ions, such as Xe@super 44+@ and Au@super 69+@, with solid surfaces is dominated by the deposition of potential energy, rather then the kinetic energy of the ions.@footnote 1,2@ For Au@super 69+@, the sum of the binding energies of the electrons that were removed when forming the ion is 170 keV. This energy is deposited into a nanometer scale area within about 10 fs when an Au@super 69+@ ion impinges on a surface.@footnote 3@ In our presentation we will report on the characterization of undoped silicon after exposure to low doses (~10E11 cm@super -2@) slow, highly charged ions. We recently observed strong photoluminescence at ~565 nm from irradiated silicon surfaces.@footnote 4@ Possible microscopic mechanisms for this effect will be discussed. We will compare atomic force microscopy data from surface defects induced by single ion impacts on mica, self-assembled monolayers and silicon in light of model descriptions of the materials response to the impact of slow, highly charged ions. Acknowledgements: This work is supported by the Director, Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC03-76SF00098. Part of this work was performed under the auspices of the U. S. Department of Energy by Lawrence Livermore National Laboratory under contract No. W-7405-ENG-48. @FootnoteText@@footnote 1@T. Schenkel et al, Prog. Surf. Sci. 61, 23 (1999) @footnote 2@T. Schenkel, et al., Phys. Rev. Lett. 80, 4325 (1998) @footnote 3@M. Hattass, et al., Phys. Rev. Lett. 82, 4795 (1999) @footnote 4@M. W. Newman, et al., submitted for publication.