Click a paper to see the details. Presenters are shown in bold type.
| 3:00pm | AT-TuA4 Sustainable Semiconductor Manufacturing: Methods and Applications to Reduce the Environmental Impact of Chip Making S. Raoux, D. Ho, R. Smati, M. Alaoui, P. Porshnev, T. Francis, Applied Materials |
| 3:20pm | AT-TuA5 Reducing PFC Emissions from a Semiconductor Wafer Fab: Optimization of Chamber Clean Processes for the CVD Tool Set A.D. Johnson, Air Products and Chemicals, Inc., C. Deuper, Philips Semiconductor, The Netherlands |
| 3:40pm | AT-TuA6 AMD's Global Climate Protection Plan R. Content, AMD |