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    Advancing toward Sustainability Topical Conference Tuesday Sessions
       Session AT-TuA

Paper AT-TuA4
Sustainable Semiconductor Manufacturing: Methods and Applications to Reduce the Environmental Impact of Chip Making

Tuesday, October 30, 2001, 3:00 pm, Room 111

Session: Sustainable Climate-Friendly Semiconductor Manufacturing
Presenter: S. Raoux, Applied Materials
Authors: S. Raoux, Applied Materials
D. Ho, Applied Materials
R. Smati, Applied Materials
M. Alaoui, Applied Materials
P. Porshnev, Applied Materials
T. Francis, Applied Materials
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The semiconductor industry is pursuing aggressive programs to reduce the environmental impact of its manufacturing processes. Great progress has been made in the area of global warming perfluorocompound (PFC) emissions: Technologies have been developed that can provide up to two orders of magnitude lower emissions from Etch and CVD chamber cleaning, compared to the processes of records of just a few years ago. Much can be learned from the strategy that was adopted to find solutions to the PFC problem. First, environmentally friendly technologies must conciliate process performance and economic viability. Second, one must realize that industrial processes are not developed in isolation from their surroundings but are rather part of an overall industrial ecosystem. This mind set is steadily gaining ground as business studies realize the gain in productivity that can be made by implementing green technologies. Here we review some methods and applications currently used in the semiconductor equipment industry to assess and reduce gas consumption and emissions, reduce solid waste and conserve energy and water resources.