Electromagnetic wave propagation in magnetically enhanced inductively coupled plasmas (MEICPs) enables power deposition to occur remotely from the coils and at locations beyond the classical skin depth. 3-dimensional, azimuthally symmetric components of the electric field can be produced by an azimuthally symmetric (m=0) antenna in flaring solenoidal static magnetic fields. Asymmetric antennas (m=+1,-1) produce 3-d components of the electric field lacking any significant symmetries, and so must be fully resolved in 3-dimensions. To investigate these processes, a 3-dimensional plasma equipment model was improved to resolve 3-d components of the electric field produced by m=+1,-1 antennas in flaring magnetic fields. A tensor conductivity was used to couple the components while solving the wave equation in the frequency domain using an iterative, sparse matrix technique. For gas pressures of 2-20 mTorr, magnetic fields of 10-300 G, we observe rotation of the electric field downstream of the antenna where significant power deposition also occurs. Feedback from the plasma which produces local extrema in conductivity (e.g., ionization rates and electron temperatures peak where fields are largest) result in the electric field patterns not having pure modal content. Comparisons for electron density and temperature will be made to probe measurements made in a MEICP having a helicon source.
@FootnoteText@
@footnote 1@Work supported by NSF, SRC and Applied Materials