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    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP3
Spatial and Temporal Behaviour of the Plasma Parameters in a Pulsed Magnetron Discharge

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: J.T. Gudmundsson, University of Iceland
Authors: J.T. Gudmundsson, University of Iceland
J. Alami, Linkoping University, Sweden
U. Helmersson, Linkoping University, Sweden
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We demonstrate the evolution of the electron energy distribution and the plasma parameters in a high density plasma in a pulsed magnetron discharge. The high density plasma is created by applying a high power pulse (1 -- 3 MW) with repetition frequency 50 Hz to a planar magnetron discharge. The spatial and the temporal behaviour of the plasma parameters are investigated using a Langmuir probe; the electron energy distribution function, the electron density and the average electron energy. Furthermore we report on the variation of the plasma parameters and electron energy distribution function with pulse length and the gas pressure in the pressure range 0.5 -- 5 mTorr. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at roughly 1 x 10@super 18@ m@super -3@ at 2 mTorr in a pulsed discharge with average power 300 W. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high energy electron group the electron density peaks and the electron energy distribution appear to be Maxwellian like. Following the electron density peak the plasma becomes more Druyvesteyn like with higher average electron energy.