IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP27
Change of Surfaces of PDP Panel during Discharge

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: K.H. Lee, Hanyang University, Korea
Authors: K.H. Lee, Hanyang University, Korea
H. Soh, Hanyang University, Korea
Y.C. Kim, Hanyang University, Korea
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Plasma display panel (PDP) is a most promising candidate for large-area wall-hanging displays because of the features of a simple panel structure and simple processes appropriate for large-area displays.@footnote 1@ Aging process accomplished for 48 hours in PDP fabrication stabilizes the inside of panel and maintains optical performance by initial discharge. We must reduce long aging time for productivity improvement. For these reasons, we investigated an effect which aging process exerts in surface of front panel and rear panel. In this experiment, we developed in-situ analysis system analyzing panel surface without the exposure to minimize the outside influence. This in- situ analysis system can analyze 7 inch test panel. The performance and lifetime of a PDP is strongly related to the MgO protection film, the phosphor layer and discharge gas.@footnote 2@ Therefore, we observed MgO protection film of front panel and Phosphor layer of rear panel according to aging time. Also, in order to find out surface changes according to plasma discharge, 30 minutes aging sample was discharged by He plasma with increasing power. The physical and chemical properties were characterized X-ray photoelectron spectroscopy (XPS), Auger electron microscopy (AES), Atomic force microscope (AFM), Mass spectroscopy (QMS200). @FootnoteText@ @footnote 1@Tsutae Shinoda,Masayuki Wakitani,Toshiyuko Nanto,Noriyuki Awaji and Shinji Kanagu IEEE TRANSATIONS ON ELECTRON DEVICE, vol.47,NO.1, 77 January 2000 @footnote 2@Kunio YOSHIDA, Heiju UCHIKE, Masahiro SAWA, IEICE TRANS.ELECTRON, VOL.E82-C, N10, 1798 (1999)