IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP22
Synthesis of Organic Polymer Thin Films by Plasma Assisted CVD for Low k Dielectrics Application

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: S.-H. Cho, Sungkyunkwan University, Korea
Authors: M.-C. Kim, Sungkyunkwan University, Korea
S.-H. Cho, Sungkyunkwan University, Korea
J.G. Han, Sungkyunkwan University, Korea
S.-B. Lee, Sungkyunkwan University, Korea
J.-H. Boo, Sungkyunkwan University, Korea
Correspondent: Click to Email
Plasma polymerized thin films have been deposited on Si(100) substrates at growth temperature between room temperature and 400 °C using thiophene (C@sub 4@H@sub 4@S) precursor by plasma assisted chemical vapor deposition (PACVD) method for low-dielectric device application. In order to compare physical properties of the as-grown thin films, the effects of the plasma power, gas flow ratio and deposition temperature on the dielectric constant and thermal stability were mainly studied. XRD and TED studies revealed that the as-grown thin films have highly oriented amorphous polymer structure. XPS data showed that the polymerized thin films that grown under different RF power and deposition temperature as well as different gas ratio of Ar:H@sub 2@ have different stoichiometric ratio of C and S compared with that of monomer, indicating a formation of mixture polymers. Moreover, we also realized that oxygen free and thermally stable polymer thin films could be grown at even 400 °C. The results of SEM, AFM and TEM showed that the polymer films with smooth surface and sharp interface could be grown under various deposition conditions. From the electrical property measurements such as I-V and C-V characteristics, the minimum dielectric constant and the best leakage current were obtained to be about 3.22 and 10 @super -11@ A/cm @super 2@, respectively.