IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP21
A New Protective Layer Using Plasma Polymerized Thin Films in Plasma Display Panel

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: S.O. Kim, University of Illinois at Urbana-Champaign
Authors: S.O. Kim, University of Illinois at Urbana-Champaign
G.H. Miley, University of Illinois at Urbana-Champaign
Correspondent: Click to Email
Flat panel displays have recently received much attention in research and development as alternatives to cathode ray tube(CRT). The plasma display panel(PDP) is considered a promising candidate as a conventional display. The performance of ac-plasma display panel(PDP) is influenced strongly by the surface plasma characteristics on the protective layer. The new protective layer in ac-plasma display panel(PDP) manufactured by plasma polymerization is a monomer produced by MMA(Methyl methacrylate). The functional groups of MMA appeard in the PPMMA(Plasma polymerized methyl methacrylate) as well, and this was confirmed through an analysis using FT-IR. The polymerization rate of plasma polymer increased as a function of the plasma power and decreased as a function of the system pressure using scanning electron microscopy(SEM). Plasma polymer has highly secondary electron emission coefficient from 0.02 to 0.14 as a function of the pure Ne ions under accelerating voltage ranged from 50 V to 150 V.