IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP20
Self-consistent Particle Modelling of Plasma-solid Interaction: Sheath Formation in Electronegative Plasma

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: V. Hrachova, Charles University, Czech Republic
Authors: R. Hrach, Charles University, Czech Republic
V. Hrachova, Charles University, Czech Republic
M. Vicher, Charles University, Czech Republic
Correspondent: Click to Email
Low-temperature reactive plasmas employing electronegative gases are often used for various material processing. Negative ions in such plasmas affect the transport of charged species from plasma to immersed substrates and in this way the corresponding plasma-chemical technologies. The same situation holds for probe diagnostics of low-temperature plasmas containing negative ions. The derived results depend on various plasma and electrode parameters - as plasma composition, pressure, and form of substrate/probe, etc. - in rather complicated way. In order to simplify the discussion of experimental results a PIC-MC plasma model was suggested and following questions were studied: * the influence of plasma composition, especially the influence of negative ions, on the distribution of electric potential near the metal substrate * the influence of pressure on the energy and angular distributions of charged particles in the vicinity of plasma-solid boundary as well as on the fluxes of charged particles on the substrate of solids immersed into plasma * the dynamical processes taking part in plasma-solid interaction when applying either negative or positive step voltages on the substrate. The simulation was performed for O@sub 2@/Ar plasma in the positive column of dc glow discharge. The attention was devoted both to the calculation of plasma properties together with their comparison with experimentally derived results and to the technique of computer simulation. Computer experiment enabled to discuss various mechanisms in the plasma affecting the distribution of electric potential as well as the fluxes of charged species separately.