IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS-TuP

Paper PS-TuP2
Spectroscopic Study of the Energetic Character of O@sub 2@/Ar/Tetramethyltin Discharge used for the Deposition of Transparent Conductive Tin Oxide Thin Films

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Plasma Deposition, Modeling, and Emerging Applications Poster Session
Presenter: F. Arefi-Khonsari, ENSCP-University of P.&M.Curie-Paris-France
Authors: F. Arefi-Khonsari, ENSCP-University of P.&M.Curie-Paris-France
N. Bauduin, ENSCP-University of P.&M.Curie-Paris-France
J. Amouroux, ENSCP-University of P.&M.Curie-Paris-France
Correspondent: Click to Email
Non stoichiometric tin oxide thin films have been deposited from an O@sub2@/Ar/tetramethyltin (TMT) mixture in a RF glow discharge parallel plate reactor at low pressure (15 Pa) and at low temperature (25-80 °C). The spectroscopic study of the discharge was performed with the help of optical emission spectroscopy and mass spectrometry. The aim of this work was to determine the role of the experimental parameters on the energetic and chemical characteristics of the discharge. This work was carried out by determining the vibrational temperature of N2 (C@sub 3@@PI@@sub u@,v'-B@sub 3@@PI@@sub g@,v" transition) as well as the rotational temperatures of OH (Q@sub 2@ rotational branch of the A@sub 2@@SIGMA@@super +@,v'=0 - X@sub 2@@PI@@sub i@,v'=0 transition) and N@sub 2@@super +@ (R0 rotational branch of the B@sub 2@@SIGMA@@sub u@@super +@, v'=0 - X@sub 2@@SIGMA@@sub g@@super +@,v'=0 transition). The mean electronic temperature was determined with the help of OES, by using Junk and Getty's model. In the latter they have used a maxwellian distribution of the EEDF which cannot hold in our conditions. That is why we have used the nonmaxwellian distribution of the energy of the electrons by solving the Boltzman's equation. The results show that the energetic character of the discharge was not modified when the organometallic precursor (i.e. TMT) was introduced. The dissociation rate increased with the power giving rise to a plateau around 200 watts which corresponded to the conditions where carbon free SnO@sub 2@ films were deposited. As for the biasing of the substrate electrode,which gave rise to an increase of the conductivity from 0.01 to 100 @ohm@@super -1@.cm@super -1@ with a decrease of the gap energy (from 3.5 to 2.5 eV), it did not give rise to a change of the energetic character. However, a spatially resolved study of the discharge by OES showed an increase of the intensities in the sheaths of both electrodes.