IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Monday Sessions
       Session PS-MoP

Paper PS-MoP3
Investigation and Modeling of Plasma-Wall Interactions in Inductively Coupled Fluorocarbon Plasmas and the Effects of Chamber Dimension

Monday, October 29, 2001, 5:30 pm, Room 134/135

Session: Plasma Diagnostics and Plasma-Surface Interactions Poster Session
Presenter: E.A. Joseph, University of Texas, Dallas
Authors: E.A. Joseph, University of Texas, Dallas
S.P. Sant, University of Texas, Dallas
L.J. Overzet, University of Texas, Dallas
M. Goeckner, University of Texas, Dallas
M.J. Kushner, University of Illinois, Urbana Champaign
Correspondent: Click to Email
Plasma-wall interactions in fluorocarbon based feedgas chemistries, namely CF4, are examined in both a standard and a modified inductively coupled Gaseous Electronics Conference (GEC) reference cell using In-Situ Fourier Transform Infrared Spectroscopy (FTIR). Initial measurements in the standard GEC reference cell show the dissociation of the CF4 feedgas into radical CFx species as has been observed elsewhere.@footnote 1@ Experimental results from both the standard GEC reference cell as well as the modified GEC reference cell, which differs from the standard cell in that it has easily configurable plasma exposed surfaces,@footnote 2@ are compared to results from the Hybrid Plasma Equipment Model@footnote 3@ to better elucidate the influence of the plasma exposed surfaces on plasma parameters including, but not limited to, plasma density, wall temperature, and CFx polymer thickness. @FootnoteText@ This material is based upon work supported by the National Science Foundation under Grant No. 0078669 @footnote 1@M. J. Goeckner, M. A. Henderson, J. A. Meyer, and R. A. Breun, J. Vac. Sci. Technol. A 12, 3120 (1994) @footnote 2@M. J. Goeckner, J. M. Marquis, B. J. Markham, and A. K. Jindal, Bull. Am. Phys. Soc. Vol. 45 No. 6 @footnote 3@R. Kinder and M. J. Kushner, J. Vac. Sci. Technol. A 19, 76 (2001).