IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Monday Sessions
       Session PS-MoP

Paper PS-MoP23
Fluorocarbon Decomposition Products and Effluent Analysis from Atmospheric Pressure Dielectric Barrier Discharges

Monday, October 29, 2001, 5:30 pm, Room 134/135

Session: Plasma Diagnostics and Plasma-Surface Interactions Poster Session
Presenter: S.F. Miralai, Wright State University
Authors: S.F. Miralai, Wright State University
S. Mukhopadhyay, Wright State University
V. Shanov, University of Cincinnati
S. Datta, Procter & Gamble
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Dielectric barrier discharges (DBDs) are gaining increased attention as an economical and reliable method for generating non-equilibrium plasma conditions in atmospheric pressure gases. This has led to a number of important applications including industrial ozone generation, surface modification of polymers, excitation of CO2 lasers and large area plasma flat panel displays. One of the challenges in the development of applications of DBD is an understanding of reactive species generated in the plasma and analysis of effluent gases. Some of the reaction products in the effluent gases are in very low concentration, increasing the complexity of the detection process. This paper deals with the detection of reactive species and products in the plasma and in the effluent gases from a fluorocarbon dielectric barrier discharge plasma . Dissociation efficiencies of fluorocarbons at various frequencies and using different carrier gases , such as helium, nitrogen, argon and oxygen will be presented. Analysis of the reactive species and products will be described, using Optical Emissions Spectroscopy (OES) and Quadrupole Mass Spectrometry. Correlation of experimental data with preliminary modeling results will be presented.