| AVS 47th International Symposium | |
| MEMS | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MM-WeP1 Characterizing the Thermal Behavior of Thin Films Using Micromachined Cantilevers H.-C. Tsai, W. Fang, National Tsing Hua University, Taiwan |
| MM-WeP2 Electrical and Spectroscopic Characterization of Palladium Implanted Elevated Temperature Silicon Carbide Chemical Sensors C.I. Muntele, Alabama A&M University, P. McCarty, University of Alabama, Huntsville, I. Muntele, D. Ila, Alabama A&M University, J.J. Weimer, M.A. George, University of Alabama, Huntsville, D.J. Larkin, NASA Glenn Research Center, D.B. Poker, D.K. Hensley, Oak Ridge National Laboratory |
| MM-WeP3 Polymer Based Microsensors Using Piezoresistive Microcantilever Technology T.L. Porter, M.P. Eastman, D. Pace, M. Bradley, Northern Arizona University |