AVS 47th International Symposium
    MEMS Wednesday Sessions
       Session MM-WeP

Paper MM-WeP3
Polymer Based Microsensors Using Piezoresistive Microcantilever Technology

Wednesday, October 4, 2000, 11:00 am, Room Exhibit Hall C & D

Session: Poster Session
Presenter: T.L. Porter, Northern Arizona University
Authors: T.L. Porter, Northern Arizona University
M.P. Eastman, Northern Arizona University
D. Pace, Northern Arizona University
M. Bradley, Northern Arizona University
Correspondent: Click to Email
We have tested a new type of microsensor based on piezoresistive microcantilever technology. In these devices, tiny beads of polymeric or functionalized polymeric material deposited on a substrate are in direct contact with the microcantilevers. Upon exposure to analytes, the polymers may expand or contract, and this volume change is measured directly by the piezoresistive cantilever. The measured response is a simple change in the resistance of the cantilever. There are many advantages of this type of sensor over microsensors based on chemiresistor or vibrating cantilever methods. Many individual sensing units may be incorporated into a "single chip" array using existing semiconductor fabrication techniques. Control and sensing electronics are very simple and inexpensive, making portable sensing arrays practical. There is no need to coat, functionalize, or attach species to the cantilever. Using biologically active layers in place of the polymeric materials, bio-sensor arrays may also be produced. In this paper, the piezoresistive cantilever technology is tested using plymers such as PEVA in the prsence of analytes such as toluene, hexane, water vapor, ethanol and acetone.