AVS 47th International Symposium
    Semiconductors Wednesday Sessions
       Session SC+EL+SS-WeP

Paper SC+EL+SS-WeP2
Ferrocene and Decamethylferrocene Adsorption and Decomposition on Ag(100) and Si(111)

Wednesday, October 4, 2000, 11:00 am, Room Exhibit Hall C & D

Session: Poster Session
Presenter: C.M. Woodbridge, University of Nebraska, Lincoln
Authors: C.M. Woodbridge, University of Nebraska, Lincoln
D.L. Pugmire, University of Nebraska, Lincoln
N.M. Boag, University of Salford
M.A. Langell, University of Nebraska, Lincoln
Correspondent: Click to Email
Although metallocenes show potential as Chemical Vapor Deposition (CVD) source molecules, there is comparatively little known about their interactions with oriented substrates. We have investigated the adsorption and decomposition of ferrocene (FeCp@sub 2@) and decamethylferrocene (FeCp@sub 2@*) on Ag(100) and Si(111) using High Resolution Electron Energy Loss Spectroscopy (HREELS), Temperature Programmed Desorption (TPD), and X-ray Photoelectron Spectroscopy (XPS). For weakly-interacting systems such as those which occur with Ag(100), both FeCp@sub 2@ and FeCp@sub 2@* are adsorbed molecularly at 130 K. Monolayers of both FeCp@sub 2@ and FeCp@sub 2@* are oriented such that their molecular axes are perpendicular to the plane of the Ag(100) substrate; monolayer desorption occurs at approximately 250 K for both metallocenes. While FeCp@sub 2@ desorption is clean, FeCp@sub 2@* shows significant amounts of metallocene dissociation competing with molecular desorption. The Si(111)/metallocene systems also show molecular adsorption at 130 K but are more reactive to thermal decomposition upon heating and decompose primarily through hydrogenation and ligand-metal dissociation mechanisms. Specific information about the orientation of the adsorbed species and decomposition intermediates will be discussed.