AVS 47th International Symposium
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuP

Paper PS-TuP15
Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: T. Ikegami, Kumamoto University, Japan
Authors: T. Ikegami, Kumamoto University, Japan
S. Ishibashi, Kumamoto University, Japan
Y. Yamagata, Kumamoto University, Japan
K. Ebihara, Kumamoto University, Japan
R.K. Thareja, Indian Institute of Technology Kanpur, India
J. Narayan, North Carolina State University
Correspondent: Click to Email
A DLC film has excellent properties like a diamond and its applications are expected in many fields. Pulsed laser deposition (PLD) is one of methods that can deposit hydrogen free DLC films. In order to optimize the process it is necessary to understand the ablation process. Many form of carbon species exist in the plume, therefore, their number densities and energy states seem to affect the characteristic of the deposited DLC films. However, it has not been well understood about relation between their behavior and the film properties. Emission spectroscopic analysis is usually used to the plasma plume measurement, but this method give no information on non-emissive. A carbon plasma plume produced by the KrF excimer laser ablation of a graphite target was measured by the laser induced fluorescence (LIF) method. C@sub 2@ molecules produced from the target were excited by a probe laser using C@sub 2@ swan band a@super 3@@PI@@sub u@-d@super 3@@PI@@sub g@. Two-d imensional LIF signals from C@sub 2@ molecules were measured using an ICCD camera at several delay time of the probe laser incidence from the KrF laser irradiation. Experimental results showed that C@sub 2@ molecules have relatively low internal and kinetic energy and locally exist near the target and its density decreased with increasing laser fluence.