AVS 47th International Symposium
    Manufacturing Science and Technology Thursday Sessions
       Session MS-ThA

Paper MS-ThA5
Integrating Process Models, Equipment Logistics, and Factory Flow for Manufacturing Systems Optimization

Thursday, October 5, 2000, 3:20 pm, Room 304

Session: Advanced Modeling for IC Manufacturing
Presenter: L. Henn-Lecordier, University of Maryland
Authors: L. Henn-Lecordier, University of Maryland
M.-Q. Nguyen, University of Maryland
B. Conaghan, University of Maryland
P. Mellacheruvu, University of Maryland
J.W. Herrmann, University of Maryland
G.W. Rubloff, University of Maryland
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Technology change, yield learning, and market shifts all produce notable factory dynamics, yet anticipating the operational consequences of process changes and optimizing the overall system remains largely an ad hoc procedure. We have developed a heterogeneous simulation environment (HSE) which integrates process and operational dynamics from the unit process to full factory flow. Process models are incorporated as response surfaces which determine cycle times in corresponding equipment modules. In turn, the operational behavior of multiple modules on cluster tools is investigated through discrete event simulation for specific cluster tool architecture, module population, and scheduling algorithms. Finally, process and cluster tool models are incorporated into factory-level discrete event simulations (Factory Explorer). Management of process, equipment, and factory parameters, as well as model execution, is carried out through a simulation supervisor and its graphical user interface. These integrated models enable tradeoff analysis involving specific process parameters, cluster tool configuration and logistics, and factory flow as a function of tool populations. We have studied the specific example of a W plug process sequence, involving clean, PVD TiN liner deposition, and W CVD fill. Results indicate notable cycle time advantage for individualized cluster tool sequencing optimized for the chosen process parameters, as compared to using routine dispatching rules. The HSE also reveals the factory level operations consequences of re-entrant flow, where the dimensions of different interconnect levels produce different throughputs for different levels. Thus, the HSE presents a potentially valuable tool for rapid optimization in the presence of factory dynamics, usable by operations, equipment, and process engineers.