| AVS 47th International Symposium | |
| MEMS | Wednesday Sessions |
| Session MM-WeA |
| Session: | MEMS Processing |
| Presenter: | B.C. Bunker, Sandia National Laboratories |
| Authors: | B.C. Bunker, Sandia National Laboratories J.G. Kushmerick, Sandia National Laboratories W.L. Smith, Sandia National Laboratories M.S. Kent, Sandia National Laboratories G.P. Lopez, University of New Mexico X.-Y. Zhu, University of Minnesota D.L. Huber, Sandia National Laboratories T.D. Dunbar, Sandia National Laboratories |
| Correspondent: | Click to Email |