AVS 47th International Symposium
    Incorporating Principles of Industrial Ecology Wednesday Sessions
       Session IE+PS+MS+SE-WeM

Paper IE+PS+MS+SE-WeM5
Photocatalytic, Anti-fogging Mirror

Wednesday, October 4, 2000, 9:40 am, Room 304

Session: Environmentally Friendly Process Development
Presenter: K. Takagi, ULVAC Japan, Ltd.
Authors: K. Takagi, ULVAC Japan, Ltd.
H. Hiraiwa, ULVAC Japan, Ltd.
T. Makimoto, ULVAC Japan, Ltd.
T. Negishi, ULVAC Japan, Ltd.
Correspondent: Click to Email
Recently, environmental pollution is growing more serious everyday, and it is urgently required to develop resource-saving and non-chemical products, which may save and even purify the nature. In such circumstances, titanium dioxide (TiO@sub 2@) thin coating film has come into the spotlight as a savior of the environmental problems. Because of its attractive photocatalytic natures, such as anti-bacterial, self-cleaning, decomposition of organic substances, and super-hydrophilic natures, TiO@sub 2@ has been studied and developed energetically in these days. Already, its super-hydrophilic and self-cleaning natures are applied to automobiles' anti-fogging side mirrors, which are now in practical use, and ULVAC Japan is one of the top makers for manufacturing vacuum deposition system for anti-fogging mirrors. The film architecture of this mirror is the double layer of SiO@sub 2@ / TiO@sub 2@ on the substrate coated by E/B evaporation or sputtering. The photocatalytic natures are as follows; 1. The contact angle of water on this surface is less than 10@Ao@ after irradiation of Blacklight, on which the engine oil is spreaded and cleaned by washing. 2. The contact angle keeps less than 10@Ao@ when this sample is preserved in the dark room. This report describes current developmental status of vacuum deposition system for TiO@sub 2@/SiO@sub 2@ thin film coating that is applied to automobile-mounted photocatalytic mirrors and is useful for environment saving and purification.