| AVS 46th International Symposium | |
| Vacuum Technology Division | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | VT-WeA1 Invited Paper Dry Vacuum Pumps - A Method for the Evaluation of the Degree of Dry A.D. Chew, R.P. Davis, R.A. Abreu, BOC Edwards, U.K. |
| 2:40pm | VT-WeA3 Invited Paper Ebara AAS-series Screw-type Dry Vacuum Pump Y. Watanabe, R. Ward, Ebara Technologies, Incorporated |
| 3:20pm | VT-WeA5 Invited Paper Adapting Dry Vacuum Technology to Cu CVD Effluent Abatement in Integrated Circuit Manufacturing J.R. Bottin, D.G. Mrotek, Leybold Vacuum Products |
| 4:00pm | VT-WeA7 Invited Paper Dry Pumping S. Doherty, F. Ramberg, P. Annandale, Alcatel Vacuum Products |
| 4:40pm | VT-WeA9 Invited Paper The Dry Pump in the Industrial Market J. Scherbik, Stokes Vacuum Inc. |