AVS 46th International Symposium
    Vacuum Technology Division Wednesday Sessions
       Session VT-WeA

Invited Paper VT-WeA1
Dry Vacuum Pumps - A Method for the Evaluation of the Degree of Dry

Wednesday, October 27, 1999, 2:00 pm, Room 610

Session: Dry Pumping Systems
Presenter: A.D. Chew, BOC Edwards, U.K.
Authors: A.D. Chew, BOC Edwards, U.K.
R.P. Davis, BOC Edwards, U.K.
R.A. Abreu, BOC Edwards, U.K.
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The drive towards dry vacuum pumping has occurred across the spectrum of vacuum applications from semiconductor manufacture to industrial processing. This brings with it a need to systematically evaluate and quantify the degree of cleanliness characteristic of any particular pump; currently there is no universally accepted method to perform this function. A methodology which has been developed for repeatable measurements of pump cleanliness will be discussed. It is based on residual gas analysis under carefully controlled pump conditions. This facilitates direct comparisons of cleanliness between pumps of the same and different design. Additionally it allows for the assessment of methods introduced to improve cleanliness.