| AVS 46th International Symposium | |
| Vacuum Technology Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | VT-TuA1 Invited Paper Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975) D.E. Meyer, Consultant |
| 2:40pm | VT-TuA3 Invited Paper Evolution of Integrated Circuit Vacuum Processes: 1962-1975 R.K. Waits, Technical Marketing Programs |
| 3:20pm | VT-TuA5 History of Plasma Ashing and Plasma Etching in the Semiconductor Industry from 1950 to 1975 R.L. Bersin, Ulvac Technologies, Inc. |
| 3:40pm | VT-TuA6 History of Commercial Ion Implantation C.B. Yarling, EEESPEC/Ion Beam Press |
| 4:00pm | VT-TuA7 Application of Sub-atmospheric Plasmas to Semiconductor Device Processing D.M. Mattox, Management Plus Inc. |
| 4:20pm | VT-TuA8 Invited Paper Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes J.F. O'Hanlon, University of Arizona |