AVS 46th International Symposium
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuA

Invited Paper VT-TuA8
Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes

Tuesday, October 26, 1999, 4:20 pm, Room 610

Session: Vacuum Contributions to the Semiconductor Industry (1950-1975)
Presenter: J.F. O'Hanlon, University of Arizona
Correspondent: Click to Email

In today's competitive manufacturing environment, it is necessary to use vacuum system processes which are reliable, repeatable and cost efficient. This knowledge which constitutes our understanding of vacuum science is vast, and has on occasion been forgotten or misused. This talk will review some important concepts which have been re-invented, or re-applied or misunderstood in the course of designing modern vacuum-based processing systems.