| AVS 46th International Symposium | |
| Thin Films Division | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | TF+MM-WeM1 Detection of Photons Using Thin Films in Semiconductor MEMS P.G. Datskos, S. Rajic, Oak Ridge National Laboratory, I. Datskou, Environmental Engineering Group, Inc. |
| 8:40am | TF+MM-WeM2 Sputtered Coatings for Microfluidic Applications D.W. Matson, P.M. Martin, W.D. Bennett, J.W. Johnston, D.C. Stewart, C.C. Bonham, Pacific Northwest National Laboratory |
| 9:00am | TF+MM-WeM3 A Novel Thin-Film Proton Exchange Membrane Fuel Cell for Microscale Energy Conversion J.D. Morse, A.F. Jankowski, J.P. Hayes, R.T. Graff, Lawrence Livermore National Laboratory |
| 9:20am | TF+MM-WeM4 Invited Paper Thin Films in MEMS and MOEMS W.D. Cowan, Air Force Research Laboratory |
| 10:00am | TF+MM-WeM6 Residual Stresses in MEMS Structures B.S. Majumdar, UES, Inc., W.D. Cowan, Air Force Research Laboratories, S. Rogers, AFIT, N.J. Pagano, Air Force Research Laboratories |
| 10:40am | TF+MM-WeM8 Investigation and Modeling of Electrical Resistance in Polysilicon Thermal Actuators J.T. Butler, W.D. Cowan, Air Force Research Laboratory |