AVS 46th International Symposium
    Thin Films Division Wednesday Sessions
       Session TF+MM-WeM

Paper TF+MM-WeM2
Sputtered Coatings for Microfluidic Applications

Wednesday, October 27, 1999, 8:40 am, Room 615

Session: Thin Films in MEMS and MOEMS
Presenter: D.W. Matson, Pacific Northwest National Laboratory
Authors: D.W. Matson, Pacific Northwest National Laboratory
P.M. Martin, Pacific Northwest National Laboratory
W.D. Bennett, Pacific Northwest National Laboratory
J.W. Johnston, Pacific Northwest National Laboratory
D.C. Stewart, Pacific Northwest National Laboratory
C.C. Bonham, Pacific Northwest National Laboratory
Correspondent: Click to Email
Magnetron sputter-deposited features and coatings are finding a broad range of uses in microfluidic devices being developed at the Pacific Northwest National Laboratory (PNNL). Such features have routinely been incorporated into multi-layer laminated microfluidic components where specific functionality is required and other methods for producing these features have been deemed unacceptable. Applications include electrochemical sensors, heaters and temperature probes, electrical leads and insulation layers, and chemical modification of surfaces. Small features, such as those required for the production of microsensor electrodes or miniature resistive heaters on microfluidic chips, were patterned using standard lithographic methods or with masks produced by laser micromachining processes. Use of the coating technology and its application in specific microfluidic devices, including a groundwater sensor, a piezoelectrially actuated airflow regulator, and a microchannel flow diagnostic device, will be discussed.