AVS 46th International Symposium | |
Thin Films Division | Wednesday Sessions |
Session TF+MM-WeM |
Session: | Thin Films in MEMS and MOEMS |
Presenter: | J.D. Morse, Lawrence Livermore National Laboratory |
Authors: | J.D. Morse, Lawrence Livermore National Laboratory A.F. Jankowski, Lawrence Livermore National Laboratory J.P. Hayes, Lawrence Livermore National Laboratory R.T. Graff, Lawrence Livermore National Laboratory |
Correspondent: | Click to Email |