| AVS 46th International Symposium | |
| Thin Films Division | Wednesday Sessions |
| Session TF+MM-WeM |
| Session: | Thin Films in MEMS and MOEMS |
| Presenter: | J.D. Morse, Lawrence Livermore National Laboratory |
| Authors: | J.D. Morse, Lawrence Livermore National Laboratory A.F. Jankowski, Lawrence Livermore National Laboratory J.P. Hayes, Lawrence Livermore National Laboratory R.T. Graff, Lawrence Livermore National Laboratory |
| Correspondent: | Click to Email |