AVS 46th International Symposium
    Thin Films Division Wednesday Sessions
       Session TF+MM-WeM

Paper TF+MM-WeM3
A Novel Thin-Film Proton Exchange Membrane Fuel Cell for Microscale Energy Conversion

Wednesday, October 27, 1999, 9:00 am, Room 615

Session: Thin Films in MEMS and MOEMS
Presenter: J.D. Morse, Lawrence Livermore National Laboratory
Authors: J.D. Morse, Lawrence Livermore National Laboratory
A.F. Jankowski, Lawrence Livermore National Laboratory
J.P. Hayes, Lawrence Livermore National Laboratory
R.T. Graff, Lawrence Livermore National Laboratory
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A novel approach for the fabrication and assembly of a proton exchange membrane (PEM) fuel cell system enables effective scaling of the fuel delivery, manifold , and cell stack components for applications in miniature and microscale energy conversion. Electrode materials for PEM fuel cells are developed using sputter deposition techniques. A thin film anode is formed through the deposition of nickel, followed by the deposition of a platinum catalyst layer. A proton conducting membrane electrolyte is formed over the catalyst using spin cast techniques. Finally, a thin film cathode is formed that incorporates a thin platinum layer, followed by a layer of silver. Scaling towards miniaturization is accomplished by utilizing novel micromachining approaches. Manifold channels and a fuel delivery system are formed within the substrate that the cell stack is fabricated on thereby circumventing the need for bulky manifold components that are not directly scalable. Methods to synthesize a base electrode layer to a thin-film PEM fuel cell from the electrolyte and a conductive material are developed using photolithographic patterning and physical vapor deposition. The microstructure and morphology desired for the anode layer should facilitate generation of a maximum current density from the fuel cell. For these purposes, the parameters of the deposition process and post-deposition patterning are developed to optimize porosity in the anode layer. The fuel cell microstructure is examined using scanning electron microscopy and the power ouput generated is characterized through current-voltage measurement. This work was performed under the auspices of the United States Department of Energy by Lawrence Livermore National Laboratory under contract #W-7405-Eng-48.