| AVS 46th International Symposium | |
| The Science of Micro-Electro-Mechanical Systems Topical Conference | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:40pm | MM+VT-ThA3 Invited Paper Quadrupole Mass Spectrometry using MEMS S. Taylor, University of Liverpool, U.K. |
| 3:20pm | MM+VT-ThA5 Miniaturizing an Ultra-High Vacuum Orbitron Pump J.Z. Wilcox, J. Feldman, T. George, JPL-Caltech, M. Wilcox, A. Scherer, Caltech |
| 3:40pm | MM+VT-ThA6 Scaling and Microfabricating a Low-Pressure Inductively Coupled Plasma Source Y. Yin, J. Hopwood, Northeastern University |
| 4:00pm | MM+VT-ThA7 Design and Fabrication of an Electromagnetically Driven Microvalve for Micro Total Analysis Systems M. Shoji, K. Yanagisawa, M. Hirano, Nippon Telegraph and Telephone Corporation, Japan, S. Nakano, NTT Advanced Technologies Corporation, Japan |
| 4:20pm | MM+VT-ThA8 MEMS Micro-Valve for Space Applications I. Chakraborty, W.C. Tang, D.P. Bame, T.K. Tang, Jet Propulsion Laboratory |
| 4:40pm | MM+VT-ThA9 Compact Fiber-Optic Pressure Sensors Using Microfabricated Sensing Membranes Y.C. Cho, NASA Ames Research Center, T. George, J. Tamayo, Jet Propulsion Laboratory |