AVS 46th International Symposium
    The Science of Micro-Electro-Mechanical Systems Topical Conference Thursday Sessions
       Session MM+VT-ThA

Invited Paper MM+VT-ThA3
Quadrupole Mass Spectrometry using MEMS

Thursday, October 28, 1999, 2:40 pm, Room 620

Session: Vacuum MEMS
Presenter: S. Taylor, University of Liverpool, U.K.
Correspondent: Click to Email

Quadrupole Mass Spectrometers (QMS) find a wide range of applications worldwide. The conventional QMS arrangement uses circular metallic rods as the mass filter excited electrically at voltages up to 1kV depending upon the application. If the size and voltages can be reduced then the range of applications for QMS instruments would increase. The application of MEMS technology allows the fabrication of submillimetre versions of such structures. In this paper the development of a miniature QMS is reported in which the conventional rod arrangement has been replaced with a microengineered version. The structure is made in silicon with metallised specially drawn glass fibres of length 20-30 mm and diameter 0.5 mm to act as the quadrupole rods. The correct electrode spacing and alignment are achieved through the use of V-shaped grooves etched into the silicon. This is about one order of magnitude smaller than most conventional QMS filters, with the potential for further reduction in size. The MEMS mass filter was mounted onto a commercial ion source, which was in turn attached to a vacuum flange and supplied by an electronic drive circuit modified to run at 6MHz. Mass spectra in the range 0-50 a.m.u were obtained and these were simulated numerically. The results indicate a linear mass scale with 5-10% valley separation between O2/N2 peaks and a best resolution at 10% peak height of around 2 a.m.u at mass 40. Reliable QMS operation was obtained up to pressures in the 1E-4 to 1E-3 mbar range and the highest operating pressure was felt to be a limitation of the ion source, rather than the mass filter.