AVS 46th International Symposium
    The Science of Micro-Electro-Mechanical Systems Topical Conference Thursday Sessions
       Session MM+VT-ThA

Paper MM+VT-ThA8
MEMS Micro-Valve for Space Applications

Thursday, October 28, 1999, 4:20 pm, Room 620

Session: Vacuum MEMS
Presenter: I. Chakraborty, Jet Propulsion Laboratory
Authors: I. Chakraborty, Jet Propulsion Laboratory
W.C. Tang, Jet Propulsion Laboratory
D.P. Bame, Jet Propulsion Laboratory
T.K. Tang, Jet Propulsion Laboratory
Correspondent: Click to Email
We report on the development of a Micro-Electro-Mechanical (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micro-propulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL have developed a piezoelectric MEMS valve which attempts to address the unique problem of space. We begin with proven configurations which may seem familiar. However, we have implemented some major design innovations which should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, little susceptibility to shock, vibration or radiation, as well as a wide operational temperature range.