AVS 46th International Symposium
    Plasma Science and Technology Division Monday Sessions
       Session PS-MoP

Paper PS-MoP32
Electron Energy Control in Inductively Coupled Plasma Employing Multi-Mode Antenna

Monday, October 25, 1999, 5:30 pm, Room 4C

Session: Poster Session
Presenter: T. Urayama, Tokai University, Japan
Authors: H. Shindo, Tokai University, Japan
T. Urayama, Tokai University, Japan
Correspondent: Click to Email
In the deep sub-micron etching for ultra large-scale-integrated circuit(ULSI) processes, numerous requirements of the plasma, such as high aspect ratio, high etching selectivity, are becoming increasingly critical. The requirements have promoted development of low-pressure and high density plasma. In these plasmas, however,the electron energy is prone to become too high at low pressures. In this work, a method of electron energy control was studied in an inductively coupled plasma by employing different azimuthal mode antenna. It is expected for electron energy to reduce at higher azimuthal mode antenna, because induction field is reversed with a shorter length. An inductively coupled plasma(ICP)was produced in a stainless-steel chamber of 350mm in diameter by supplying the RF power of l3.56MHz through the quartz window at one end. Langmuir probe diagnostics and optical emission spectroscopy were made through several vertical and horizontal ports of the chamber. The antenna is basically constructed with copper sheet of 0.3mm thickness, and the different azimuthal modes of m=0 and m=1 of one-loop antenna are realized by changing the feeder points of the RF current.The electron energy reduction was found in the m=1 mode by Langmuir probe measurement. This behavior was also confirmed by optical emission spectroscopy. The ArII lines became more intensive in the m=0 mode, while the ArI lines less intensive. The energy reduction in the m=0 mode was considered due to reverse of induction field with a shorter length in the higher mode antenna. The electron energy distribution function also showed less averaged energy in the m=1 mode.