AVS 46th International Symposium
    Plasma Science and Technology Division Wednesday Sessions
       Session PS+SS-WeA

Paper PS+SS-WeA4
Guided Ion-beam Studies of Low Energy Cu@super +@ and Cu@sub 2@@super +@ Ion Interactions with Mo

Wednesday, October 27, 1999, 3:00 pm, Room 612

Session: Ion-Surface Interactions II
Presenter: S.L. Anderson, University of Utah
Authors: S.L. Anderson, University of Utah
A. Lapicki, University of Utah
K.J. Boyd, University of Utah
M. Aizawa, University of Utah
Correspondent: Click to Email
Results of low-energy ion beam deposition of Cu@super +@ and Cu@sub 2@@super +@ on polycrystalline molybdenum at energies from 5 to 220 eV are presented. Thermodynamics in this system favor Cu diffusion to the surface. At low energies, Cu@super +@ is deposited on the surface with a sticking probability of ~0.6. As the energy is increased above 100 eV, stable subplantation of the Cu is observed. This threshold is substantially higher than expected for penetration; it seems likely that penetration occurs at lower energies, however, migration of the subplanted Cu to the surface is efficient. The results for Cu@sub 2@@super +@ are different in that subsurface copper is observed at energies down to 40 eV (20 eV/atom). This counterintuitive result is tentatively explained by the formation of complex defects which stabilize subplanted Cu. Possible defect production mechanisms are explored using variable-angle XPS, XAES and molecular dynamics simulations.