AVS 45th International Symposium
    The Science of Micro-Electro-Mechanical Systems Topical Conference Monday Sessions
       Session MM+PS-MoM

Paper MM+PS-MoM7
Laminated Plastic Microfluidic Components for Biological and Chemical Systems

Monday, November 2, 1998, 10:20 am, Room 324/325

Session: MEMS Processing and Deep Si Etch Technology
Presenter: P.M. Martin, Battelle Pacific Northwest National Laboratory
Authors: P.M. Martin, Battelle Pacific Northwest National Laboratory
D.W. Matson, Battelle Pacific Northwest National Laboratory
W.D. Bennett, Battelle Pacific Northwest National Laboratory
D.J. Hammerstrom, Battelle Pacific Northwest National Laboratory
Correspondent: Click to Email
Laminated plastic microfluidic components are being developed for biological testing systems and chemical sensors. Applications include a DNA thermal cycler, DNA analytical systems, electrophoretic flow systems, dialysis systems, blood sampling, and metal sensors for ground water. This paper describes fabrication processes developed for these plastic microscale components. Most of the components have a stacked architecture, the fluid flows, or is pumped through as many as nine laminated functional levels. Functions include mixing, reaction, and detector channels, reservoirs, and detector electronics. Polyimide, PMMA, and polycarbonate materials with thicknesses between 25 and 100 µm are used to construct the components. This makes the components low cost, inert to many biological fluids and chemicals, and disposable. The components are fabricated by excimer laser micromachining the microchannel patterns and microstructures in the various laminates. In some cases, micropumps are integrated into these components to move the fluids. Vias and interconnects are also cut by the laser, and integrated with micropumps. The laminates are sealed and bonded by adhesive and thermal processes, and are leak tight. The parts withstand pressures as high as 790 kPa. Typical channel widths were 50 µm to 100 µm, with aspect ratios near 5. Performance data will be presented for the DNA thermal cycler and a voltammic chromium metal sensor.