AVS 45th International Symposium
    Plasma Science and Technology Division Monday Sessions
       Session PS2-MoA

Paper PS2-MoA10
Spectroscopic Measurements in an Inductively Coupled RF Discharge in Hydrogen@footnote 1@

Monday, November 2, 1998, 5:00 pm, Room 318/319/320

Session: Diagnostics I
Presenter: M.L. Huebschman, University of Texas, Austin
Authors: M.L. Huebschman, University of Texas, Austin
R.D. Bengtson, University of Texas, Austin
J.C. Wiley, University of Texas, Austin
J.G. Ekerdt, University of Texas, Austin
V. Bakshi, International Sematech
Correspondent: Click to Email
Spatially resolved electron temperature profiles, T@sub e@(r,z), and plasma density profiles, n@sub e@(r, z) were measured with a multi-chord, multi-channel optical emission spectrometry in inductively coupled hydrogen plasmas over a range of RF power and pressure in a semiconductor growth and analysis chamber. The intensities from eighteen simultaneous chords viewing the plasma were measured for ten hydrogen Balmer lines. The calibrated intensities were Abel inverted to give local densities of the upperstate populations. Spatially resolved temperature profiles were obtained from the ratio of line intensities. Electron density profiles, n@sub e@( r,z) were determined from a collisional-radiative model@footnote 2@ using the electron temperature, pressure balance, and the populations of levels n = 3, 4, 5, and 6. Measurements were made with hydrogen pressures of 5 - 50 mTorr and with input powers from 50 -200 W. Measured density and temperature profiles will be compared with fluid models. There are clear indications of capacitive coupling in the profiles. These experiments and models are motivated by the desire to develop physically accurate computational models of a simple chemical system -hydrogen on silicon- in a simple geometry which could be verified by measurements. @FootnoteText@ @footnote 1@Research supported in part by the Texas Advanced Research Program. @footnote 2@L. C. Johnson and E. Hinnov, J. Quant. Spectrosc. Radiat. Transfer. Vol. 13, 333 (1973).