AVS 45th International Symposium
    Nanometer-scale Science and Technology Division Wednesday Sessions
       Session NS+AS-WeM

Paper NS+AS-WeM5
Capacitative Force Modulation Technique in Nanoindentation

Wednesday, November 4, 1998, 9:40 am, Room 321/322/323

Session: Innovative Force, Near-Field Optics, and Tunneling Measurements
Presenter: S. Asif, Naval Research Laboratory
Authors: S. Asif, Naval Research Laboratory
K.J. Wahl, Naval Research Laboratory
R.J. Colton, Naval Research Laboratory
S.G. Corcoran, Hysitron, Inc.
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The sinusoidal force modulation technique for nanoindentation has been implemented using a three-plate capacitative force/displacement transducer developed by Hysitron, Inc. The force modulation technique can be used to detect the surface of the specimen very accurately with the stiffness sensitivity of 1N/m or less. The low spring mass (243mg), spring stiffness (120N/m) and the low damping coefficient (0.007 Ns/m) of the transducer allows one to measure the damping losses in most of the materials including metals. The experimental results on indium at room temperature indicate that the damping of the material influences the modulus measurement. The technique can be used to measure the loss and storage modulus of polymer materials (e.g. poly(vinylethylene)) and thin film systems. The experimental technique will be described together with the importance of system calibration and specimen mounting.