| 2:20pm |
SS+AS+EM-ThA1 Invited Paper
Visualizing the Nanoscale Electrostatics of Material Interfaces
Vincent LaBella, SUNY Polytechnic Institute, W. Nolting, University at Albany, SUNY |
| 3:20pm |
SS+AS+EM-ThA4
Reactions of Benzoquinone with Hydrogen Terminated Silicon Surfaces
Meixi Chen, J.H. Hack, A. Iyer, R.L. Opila, University of Delaware |
| 4:00pm |
SS+AS+EM-ThA6
Uniform Reactivity and Bonding between Si(100) and GaAs(100) Wafers using Low Temperature (<180°C) Wet NanoBonding™ Optimized by Surface Energy Analysis
Nicole Herbots, R. Islam, Cactus Materials |
| 4:20pm |
SS+AS+EM-ThA7
Evaluation of Silicon Oxidation in Downstream Plasma Photoresist Strip with Reducing Chemistries
Tongchuan Gao, V. Vaniapura, Mattson Technology, Inc. |
| 4:40pm |
SS+AS+EM-ThA8
Surface-sensitive Measurement of Dielectric Screening via Atom and Electron Manipulations
Daejin Eom, E. Seo, J.-Y. Koo, Korea Research Institute of Standards and Science, Republic of Korea |
| 5:00pm |
SS+AS+EM-ThA9
The Effects of UV Irradiation, Stage Temperature, and Radical Flux on UV-Ozone Treatment using High-aspect-Ratio Cave Structures
Shogo Uehara, T. Sugawara, P. Wood, SAMCO Inc. |
| 5:20pm |
SS+AS+EM-ThA10
Density Functional Theory Study of the Effects of Surface Defects on the Interactions of Cl and α-Fe2O3 (0001) Surface
Qin Pang, H. DorMohammadi, O.B. Isgor, L. Árnadóttir, Oregon State University |